A-Tech System

Optical coatings Hard coatings Metal coatings Polymer surface modifications Coatings for flat panel display electorates

Metal, ceramic, and alloy depositions for R&D in OLED fields. Cluster sputtering system for TCO deposition with two sputtering chambers and one glove

Applicable to various R&D fields that sputter deposition of metals and ceramic materials is necessary.

Metal, ceramic, and alloy deposition for basic research in various fields. Deposition of metallic and inorganic layers is not only available.

Graphene synthesis. Multi-functional CVD system combined with ICP CVD and probe station.

CNTs growth for field emission display device. Small thermal CVD system for carbon nano tube synthesis.

Metal, oxide, magnetic materials etching. TCP etching system for R&D and small scale production.

Metal etching, Silica etching, Polymer etching. TCP etching system with 3 chambers for R&D and small scale production.

Metal coating. Metal Nitride coating.

Multi-functional cluster system combined with PECVD, sputter and E-beam evaporation for high quality graphene synthesis.