Product Description

• It is suitable for PFC abatement for CVD process,etc.., specially for NF3
• Partition plate chamber design, improve waste gas retention time
• Due to front and back scrubber, handles gas efficiently .Water-soluble, hydrolysable gas and power dust are handled by front and back scrubber.
• Efficient decomposition of dangerous and toxic gas by thermal oxidation. We use electric heaters for thermal oxidizing decomposition. It is safe and secure.
• Comprehensive safety consideration.Safe and compact design . This series is safely designed for malfunction and safety warnings. It has a compact design for the front and back scrubbers, reactor and other necessary functions.
• Excellent safety interlock system.Safety interlocks including flow,temperature,pressure,and leak sensors.
• Pre-heated functionality for drain in gases to enhance the processing efficiency.
• Special cooling design to prevent powder from accumulating.
• Low running cost . Uses only electricity and water, therefore it is easy to manage, making it possible to reduce running cost dramatically.
• Environmental friendly . Does not use fossil fuel, therefore there is no CO2 emission and thermal energy waste. It is an environmentaly friedly machine.
• Install anywhere, including a clean room.
• Specifications and performance have been specifically designed for use with PE-CVD processes.
• Minimum footprint and height.
• Special air currents increase heat transmission, accelerating the gas abatement rate.
• Special system with high corrosion resistance.
• Long PM cycles and short PM working time.Simple disassembly of key parts ensures high maintenance performance.
• Minimal initial costs.
• No fuel gas required.
• Uses ambient air for complete oxidation.
• User friendly interface
• Easily scaled up for large gas flow systems .
• Flexible customer design service.The customized design to meet the specific application.
• The most advanced soft touch screen control system.
• Easy operation and maintenance.
• CMS(central monitor system) to observe and easily control of each gas scrubber.
• Long gas residual time for high efficiency.
• Control the moisture exhaust.
• Option:Bypass 設計,PM不停機
• **0% parts stock support in local
• Technical support local directly
• Pre-wet scrubber design,high removal efficiency.
• Pre-heating design,high destruction efficiency.Electric heater type gas abatement system.
• Perfect abatement efficiency for flammable &water soluble gases
• Minimizing moisture vapor exhaust (Apply dry system)
• Excellent safety interlock system
• Longer maintains cycle .Simple operation and easy maintenance time.
• Relatively lower operation cost(Longer life heater easy to PM)
• Anti-corrosion material design,high corrosion resistance structure (Teflon coating lining),long operation life.
• SEMI-S2 certified
• Steam Injection for F2 Abatement – designed to treat NF3microwave clean processes
• Form balanced heating zone to maximize process efficiency
• Increase efficiency for soluble gas and power processing
• Corrosion and Accumulation Prevention System - Use better material against corrosion for chambers and heaters - Prevent corrosion and powder accumulation from a structural approach - Create a nitrogen curtain to prevent inflow of H2O, which is the main cause of HF generation
• Quick PLC control for customer satisfaction
• Point of use treatment specifically designed for treating fluorine-generating NF3 chamber clean effluent from **0 mm CVD process tools without the use of fuel. The IPI is effective for flammable,pyrophoric,corrosive and particulate-generating process gases.