Description

Technical Features 1. Modularized design and machining of the vacuum chamber. Increase machining quality and interchangeability of chief parts, and shorten delivery period of the whole line. 2. A high-performance rotating cathode and MF power suppplies are used, that will improve the production efficiency and the film performance greatly; 3. Uniformity of distribution of the process gas is assured through secondary *-segment gas supply. 4. An integrated and modularized cathode shielding is installed, which greatly decreases repair period. 5. An insulated cooling assembly is used at the cathode, which changes the prior fact that the magnet is negatively influenced by ceaseless absorption of impurities from the circulating water. 6. A self-developed inclined magnet matrix is used, which expands the range of the magnetic field at the surface of the cathode target, increases the area of the etched and sputtered target, and increases utilization of the target. 7. A self-developed three-dimensional magnetic strength measuring and analyzing system is used for systematical measuring of distributions of the magnet matrix and also the installation, which provides effective way for cathode R&D. The uniformity of the magnetic strength at the horizontal surface is within 2%.