Description

The vacuum pump unit includes a turbo molecular pumping station complete with turbo pump, controller and roughing system, and a separate dry multi-stage roughing pump. All equipment or factory-installed options necessary to meet the specifications below shall be included. 
 
1.The turbo molecular pumping station of vacuum pump unit
a. shall be an all-in-one system.
b. shall be capable of stable pumping capacity.
c. shall attain an ultimate vacuum of better that 0.5 mbar.
d. shall be quiet, operating at a noise level less than *0 dB.
e. shall operate at standard voltage.
 
2.Second roots pump of vacuum pump unit
a. shall have an ultimate vacuum of better than 0.5 mbar in continuous operation.
b. shall be quiet, operating at a noise level less than *0 dB.
c. shall operate at standard voltage.
d. shall be of complete, oil-less design.
e. shall have a readily available rebuild kit for purchase.