FOB Price
Get Latest Price( Negotiable )
|1 Set Minimum Order
Country:
South Korea
Model No:
Etcher-100M
FOB Price:
( Negotiable ) Get Latest Price
Place of Origin:
-
Price for Minimum Order:
-
Minimum Order Quantity:
1 Set
Packaging Detail:
-
Delivery Time:
-
Supplying Ability:
-
Payment Type:
L/C
Product Group :
South Korea
Contact Person Mr. Yoon
175-25 Cheongcheon-Dong 2, Bupyeong-Gu, Incheon, Incheon
Special Features
TCP etching system for R&D and small scale production.
Automatic robot transporting system.
Mechanical chuck and He backside cooling system.
Specifications
Average throughput : Up to *4,**0 wafers per year
Wafer capacity : 1 × 4"
Dimension : 1,**0L × 1,**0H × **0W (mm3)
Power : RF 1kW for TCP source
RF **0W for bias voltage
Gas : C2F6 / He / SF6 / B6H6 / Cl2/Ar
Substrate material : Si/SiO2
Pump : Rrotary(**0l/min, **0l/min) & Turbo(**0l/s)
| Country: | South Korea |
| Model No: | Etcher-100M |
| FOB Price: | ( Negotiable ) Get Latest Price |
| Place of Origin: | - |
| Price for Minimum Order: | - |
| Minimum Order Quantity: | 1 Set |
| Packaging Detail: | - |
| Delivery Time: | - |
| Supplying Ability: | - |
| Payment Type: | L/C |
| Product Group : | Dry Etch |
