Product Description

Special Features

In-line sputter system with 8ea linear sputter guns for R&D and a small-scale production.
Automatic process control through PLC interfacing.
Carrier loading capability : 2x*4" sheets/carrier.
Standard tact time: depends on processing.
Automatic jig moving system.
Ion cleaning system with linear ion gun.
Sheet capacity : **0 × *4" per day.
Average throughput Up to *0,**0 sheets per year

Specifications

Dimension : *0,**4L x 2,**4.5H x 1,**3W(mm3)
Power : Sputter Gun: DC Pulse *0kW
Ion Gun: 3kW
Gas : Ar, O2, N2
Pump : Loading, Rotary(1,**0L/min), TMP(**0L/sec)
Process, Rotary(1,**0L/min), TMP(1,**0L/sec)