FOB Price
Get Latest Price|
1 Set Minimum Order
Country:
South Korea
Model No:
Cluster Etch-300
FOB Price:
Place of Origin:
-
Price for Minimum Order:
-
Minimum Order Quantity:
1 Set
Packaging Detail:
-
Delivery Time:
-
Supplying Ability:
-
Payment Type:
L/C
Product Group :
South Korea
Contact Person Mr. Yoon
175-25 Cheongcheon-Dong 2, Bupyeong-Gu, Incheon, Incheon
Special Features
TCP etching system with 3 chambers for R&D and small scale
production.
Automatic robot transporting system.
ESC (Electro Static Chuck) and He cooling system for silica
etching.
Average throughput Up to **0,**0 wafers per year.
Specifications
Wafer capacity : 1 × 6"
Dimension : 1,**0L × 1,**0H × 1,**2W (mm3)
Power : AC 3kW for TCP source(*3.*6MHz)
AC **0W for bias voltage(*3.*6MHz)
Gas : CF4 / O2 / He / SF6
Substrate material : Si/SiO2
Pump : Rotary(**0 l/min, **0 l/min) & Turbo(**0 l/s, ***0
l/s)
| Country: | South Korea |
| Model No: | Cluster Etch-300 |
| FOB Price: | Get Latest Price |
| Place of Origin: | - |
| Price for Minimum Order: | - |
| Minimum Order Quantity: | 1 Set |
| Packaging Detail: | - |
| Delivery Time: | - |
| Supplying Ability: | - |
| Payment Type: | L/C |
| Product Group : | Dry Etch |
